Method of fabricating and integrating an optical assembly into a flying head

ABSTRACT

Several embodiments of a method for manufacturing an optical assembly for use in an optical flying head are provided. The optical assembly may include a solid immersion lens and a magnetic coil. Techniques are provided for fabricating the solid immersion lens and the magnetic coil. Techniques are also provided for installing the optical assembly into a slider for the optical flying head. Other embodiments are described in which a solid immersion lens is installed in or is integral with a transparent slider. A magnetic coil may also be installed in these embodiments.

This is a divisional of U.S. application Ser. No. 08/657,145, filed Jun.3, 1996, now U.S. Pat. No. 6,270,696.

BACKGROUND OF THE INVENTION

The present invention relates to methods for fabricating opticalassemblies for optical recording heads, and more particularly to amethod for fabricating optical assemblies for flying heads having solidimmersion lenses.

Optical data storage systems are of great commercial and academicinterest because of their potential for very high data density. Inmagnetic recording, the data density may be limited by particle size. Inoptical recording, the data density is often only limited by thediffraction limit of the illuminating light. In practice, the datadensity is in part also limited by the minimum diameter illuminatingradiation such as a laser beam that can be focussed on the disk.

To reduce the laser spot diameter, several methods can be employed.Higher frequency light may help matters because it has a smallerwavelength. Increasing the numerical aperture of the lens may also helpto decrease spot size.

One way of improving resolution is to use a solid immersion lens (SIL).These lenses, among other advantages, partially avoid diffractioneffects, thus allowing higher data densities.

An object of the invention is to provide a method of fabricating anoptical assembly in which a SIL is fabricated or installed for optimumdata densities.

Another object of the present invention is to fabricate a slider systemfor a flying head having an objective lens and SIL which are in focuswithout the need for automatic focusing.

Additional objects and advantages of the invention will be set forth inthe description which follows, and in part will be obvious from thedescription, or may be learned by practice of the invention. The objectsand advantages of the invention may be realized and obtained by means ofthe instrumentalities and combination particularly pointed out in theclaims.

SUMMARY OF THE INVENTION

In one aspect, the present invention is directed to a method ofmanufacturing an optical assembly in a mold. A first step locates asubstrate in the mold. The substrate—may have a first opening adjacentthe top of the substrate, a second opening adjacent the bottom of thesubstrate, and a volume between the first and second openings which issubstantially empty. The first opening may have a radius greater thanthe second opening and the first and second openings may besubstantially concentric. Another step may be injecting a transparentmaterial into a volume between the first and second openings such that asolid immersion lens is formed when the material hardens.

Implementations of the method may include the following features. Amagnetic coil may be located on the substrate substantially concentricwith and adjacent to the second opening. The material may be injectedthrough the second opening.

In another aspect, the invention is directed to a method ofmanufacturing an optical assembly. A first step is forming a solidimmersion lens. Another step may be placing a solid immersion lens intoa tapered hole located between a first and a second opening in asubstrate.

In a further aspect, the invention is directed to a method offabricating an optical assembly, including the steps of forming atapered hole in a substrate, forming a solid immersion lens having atapered portion, and placing the tapered portion of the solid immersionlens into the tapered hole in the substrate.

In a further aspect, the invention is directed to a method offabricating an optical assembly in a mold, including a first step oflocating a substrate in a mold. The substrate may have a first openingadjacent the top of the substrate, a second opening adjacent the bottomof the substrate, a volume between the first and second openings and amagnetic coil substantially concentric with and adjacent to the secondopening. The first opening may have a radius greater than the secondopening and the first and second openings may be substantiallyconcentric. Other steps may include locating a partial solid immersionlens on the top of the substrate adjacent and overlapping the firstopening, and injecting a transparent material into a volume between thefirst and second openings so that the partial solid immersion lens andthe injected material together form a solid immersion lens.

In a further aspect, the invention is directed to a method ofmanufacturing an optical assembly. The method includes steps of forminga solid immersion lens having a curved surface and a flat portion;forming, placing or shaping a mesa on the flat portion of the solidimmersion lens; and placing the solid immersion lens into a hole in asubstrate.

Implementations of the invention include the following features. A thinfilm magneto-optic coil may be deposited adjacent to and encircling themesa. The mesa may be formed, for example, by grinding the flat portionof the solid immersion lens, chemically etching the flat portion of thesolid immersion lens, or depositing the mesa through a mask.

In a further aspect, the invention is directed to a method ofmanufacturing an optical assembly. The method includes the steps offorming a tapered solid immersion lens having a spherical portion and aflat mesa portion and placing the tapered solid immersion lens into atapered hole in a substrate.

In a further aspect, the invention is directed to a method ofmanufacturing an optical assembly. The method includes the steps offorming a solid immersion lens having a spherical portion and a flatportion, placing the solid immersion lens into a hole in a substrate,forming a mesa on the flat portion of the solid immersion lens, forminga separate thin film having a hole therethrough, fabricating a magneticcoil on the thin film, such that the center of the coil is near thecenter of the hole, and mounting the thin film on the substrate suchthat the mesa at least partially protrudes through the hole and magneticcoil. In an implementation of the method, the thin film may be siliconnitride (SiN).

In a further implementation, the invention is directed to mounting asubstrate and optical assembly in a slider having an air bearing surfaceand a top surface such that the flat portion of the solid immersion lensis approximately co-planar with the air bearing surface. An objectivelens may be placed on or near the top surface of the slider. In thisway, the slider, the objective lens, and the solid immersion lensmaintain fixed distances from each other.

In a further implementation, the slider or the solid immersion lens maybe lapped such that the mesa of the solid immersion lens isapproximately co-planar with the air-bearing surface of the slider.

In a further aspect, the invention is directed to a method ofintegrating an optical assembly into a slider. The method includes thesteps of forming a substantially transparent slider having a void in atop surface thereof, installing a partial solid immersion lens into thevoid, placing an objective lens on or near the top surface of theslider, and forming a mesa that extends from a bottom surface of theslider. The slider, the partial solid immersion lens, the objectivelens, and the mesa may maintain a fixed relationship with respect toeach other.

In a further aspect, the invention is directed to a method ofintegrating an optical assembly into a slider. The method includes stepsof forming a substantially transparent slider having a partial solidimmersion lens formed therein, placing an objective lens on or near thetop surface of the slider, and forming a mesa that extends from a bottomsurface of the slider.

In a further aspect, the invention is directed to a method ofintegrating an optical assembly into a slider. The method includes stepsof forming a substantially transparent slider having a void in a topsurface thereof, installing a partial solid immersion lens into thevoid, placing an objective lens on or near the top surface of theslider, placing a glass plate on a bottom surface of the slider, andforming a mesa that extends from the glass plate. The slider, thepartial solid immersion lens, the objective lens, the glass plate, andthe mesa maintain a fixed relationship with respect to each other.

In a further aspect, the invention is directed to a method ofintegrating an optical assembly into a slider. The method includes thesteps of forming a substantially transparent slider having a partialsolid immersion lens formed therein, placing an objective lens on ornear a top surface of the slider, placing a glass plate on a bottomsurface of the slider, and forming a mesa that extends from the glassplate.

Implementations of the above aspects include the following features. Acoil may be mounted adjacent the mesa. The coil may encircle the mesa.

The solid immersion lens may be formed by grinding, machining, lapping,or molding. The solid immersion lens may have a conical or pyramidalportion.

The injected material may be, for example, liquid glass or plastic withan index of refraction approximately equal to the index of refraction ofthe partial solid immersion lens.

Advantages of the invention include the following. An optical assemblyhaving a SIL for high data densities may be manufactured in a simplefashion. The fabrication technique allows the optical components tomaintain a fixed focus, eliminating the need for an active focussingmechanism.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated in and constitute apart of the specification, schematically illustrate the invention and,together with the general description given above and the detaileddescription given below, serve to explain the principles of theinvention.

FIG. 1 is a cross-sectional view of an optical assembly having asuper-hemispherical SIL according to an embodiment of the invention, asinstalled in a slider system.

FIG. 2 is a cross-sectional view of an optical assembly having ahemispherical SIL according to an embodiment of the invention, asinstalled in a slider system.

FIG. 3 is a cross-sectional side view of a mold used in a firstembodiment of the invention.

FIG. 4 is a cross-sectional side view of a mounted solid immersion lensused in a second embodiment of the invention.

FIG. 5 is a cross-sectional side view of a mounted partial solidimmersion lens used in a third embodiment of the invention.

FIG. 6(a) is a side view of a mounted partial solid immersion lens witha mesa used in a fourth embodiment of the invention.

FIG. 6(b) is a bottom view of a mounted partial solid immersion lenswith a mesa used in a fourth embodiment of the invention.

FIG. 7 is a cross-sectional view of a mounted solid immersion lens asimplemented within the body of a slider.

FIG. 8 is a cross-sectional view of a mounted solid immersion lens asimplemented within the body of a transparent slider in the case wherethe solid immersion lens is not integral with the slider.

FIG. 9 is a cross-sectional view of a mounted solid immersion lens asimplemented within the body of a transparent slider in the case wherethe solid immersion lens is not integral with the slider. A mesa formedfrom a separate glass slab is also shown.

FIG. 10 is a cross-sectional view of a mounted solid immersion lens asimplemented within the body of a transparent slider in the case wherethe solid immersion lens is integral with the slider.

FIG. 11 is a cross-sectional view of a mounted solid immersion lens asimplemented within the body of a transparent slider in the case wherethe solid immersion lens is integral with the slider. A mesa formed froma separate glass slab is also shown.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention relates to flying heads for optical disk recordingsystems. An optical disk recording system usually includes a head usedfor reading and writing data. The head includes a slider which amongother things provides air-bearing surfaces which “fly” over the surfaceof the optical recording medium. The slider also provides a mounting forcertain of the optical components. Data is usually read by a laser beam,which may be provided by a laser located away from the flying head.

FIGS. 1 and 2 illustrate an embodiment of the invention as fabricated. Ahead 50 is shown located generally adjacent a disk 61, as in a diskdrive. Disk 61 is also referred to herein as an optical recordingmedium. In this position, head 50 may be reading data from or writingdata to disk 61.

Head 50 is shown as having constituent optics together with slider 51.

The constituent optics may include a reflector 59, an objective lens 58,and a SIL 54. Each of these may be mounted to the slider 51. SIL 54 canbe substantially or entirely contained within slider 51. Objective lens58 is mounted onto or near a top surface 60 of slider 51 to focus theincident electromagnetic radiation, such as a laser beam, onto SIL 54.The incident laser beam may be, for example, from a source away fromhead 50. An optical clear path 53 is provided between SIL 54 andobjective lens 58 so that the electromagnetic radiation, such as a laserbeam, may be effectively transmitted from one to the other and backagain.

Optical clear path 53 is constituted of any optically transparentmaterial, and may be air, glass, optically clear plastic, and so on.

The electromagnetic radiation travelling through the optical clear path53 is incident on the SIL. The SIL can be a single glass partial sphereor a lesser portion of a partial sphere plus a glass flat. SIL 54generally has a curved surface 55 surrounding the partial sphericalportion and a flat portion 56. Flat portion 56 may have a glass plate ormesa bonded to it. The term “mesa” is used here to refer to an opticallytransparent projection depending from flat portion 56. The mesa may beemployed to act as the lower section of the SIL, as described below.Curved surface 55 and flat portion 56 may be entirely contained withinthe body of the slider 51. The flat portion 56 may be generallyco-planar with or in the vicinity of the air-bearing surface 52. Suchgeometry can assist the flight of the head over the disk, and forms partof the total slider air bearing surface.

At least two versions of the SIL may be used in the present invention.An embodiment using a super-hemispherical SIL 54 is shown in FIG. 1, andan embodiment using a hemispherical SIL 75 is shown in FIG. 2.

The hemispherical SIL 75 is shaped as a hemisphere of radiusapproximately r and has a flat portion 71 which can wholly containapproximately one diameter of the partial spherical section. Thesuper-hemispherical SIL 54, on the other hand, referring back to FIG. 1,is a truncated sphere. The flat surface of the super-hemispherical SIL54 contains no complete diameters of the spherical section (although itmay intersect at least one diameter at one point). Because thisconstitutes a hemisphere plus a “zone of a sphere”, where the latter isdefined as the portion of a sphere contained between two parallel planesboth intersecting the sphere, it is termed a “super-hemisphere”.

The total thickness of the super-hemispherical SIL is fabricated to bebetween r and r(1+1/n), where r is the radius of the partial sphericalsection and n is the index of refraction of the constituent material ofthe super-hemisphere.

Any SIL dimensioned between r and r(1+1/n) may be used. The choice ofsuch a thickness results in a properly focused spot on the base of theSIL. If a partial sphere thickness of less than the desired SILthickness is used, the amount by which the thickness of the SIL is lessthan that required can be made up by an equivalent optical distance of aglass plate or mesa, the formation of which is described below.

The thickness of either SIL type is also dependent on the index ofrefraction and thickness of any transparent media top coatings betweenthe bottom surface of the SIL and a recording or readout layer on thedisk. Such coatings may typically be protective dielectric layers ofSiN. A lubricant layer may also be added.

The SIL can be manufactured to have a slightly larger thickness thannoted above. In this way, upon installation of the SIL and substrateinto the slider, the flat portion of the SIL may be lapped or grinded tomake the bottom of the SIL, which may be the mesa, coplanar with the airbearing surface of the slider and total thickness approximately to therequired SIL thickness. The amount of SIL that is grinded may be, forexample, two to ten microns.

SIL 54 or 75 focusses a laser beam, which may come from a source awayfrom the head, in the near vicinity of flat portion 56 or 71,respectively. With respect to FIG. 1, the converging rays from theobjective lens 58 enter the curved surface 55 of SIL 54. Placement ofthe SIL 54 in the system then can focus the spot in proximity to theflat bottom portion 56 of the SIL 54. This is because the incomingconverging rays from the objective lens 58 are refracted at curvedsurface 55, resulting in an increased effective incident angle. This canresult in an increase in the effective numerical aperture. In ahemispherical SIL, the increased effective numerical aperture can risewith n. In a super-hemispherical SIL, the increased effective numericalaperture can rise as n².

The focussed beam thus converges near the flat portion 56 of the SIL 54.The disk 61 is normally located less than a wavelength away from theflat portion 56 of the SIL 54 in the near-field situation. In this way,evanescent waves may couple the small spot near or on portion 56 to thedisk 61. These evanescent waves generally extend a distance less than awavelength from the flat portion 56 of the SIL 54 before beingsignificantly attenuated. In the case where the near-field situation isnot used, i.e. where the total numerical aperture is less than unity,the disk may be further from the flat surface of the SIL.

Referring to FIG. 3, a first embodiment of an optical assembly 150includes a substrate 101 which is placed in an injection molding systemhaving a top mold 102 and a bottom mold 103. Top mold 102 may have adimple 104 having a partial spherical shape. Bottom mold 103 usually hasa tapered mold section 107 leading to an injection port 106.

A substrate 101 which may be used in the mold is often made of silicon,but may also be made of glass. Tapered hole 108 is formed in substrate101. The shape of tapered hole 108 may be conical, pyramidal, frustal,as well as other tapered shapes.

A transparent material is then injected into the space formed by dimple104 and tapered hole 108. This material may be any of the types commonlyused in injection molding, and is usually glass or plastic. The materialis usually injected through injection port 106, but may also be injectedfrom ports at other locations. Upon hardening, this material assumes ashape of a SIL 105. SIL 105 has a curved portion 109, a flat portion111, and a tapered portion 110. The shape of SIL 105, and moreparticularly the tapered portion, as well as that of SILs in thefollowing embodiments, may be conical, pyramidal, frustal, etc.

If the invention is operated in a phase-change media recording mode, orif only reading is required, no further modification is necessary. Inmore common modes of magneto-optical recording, a magnetic coil isrequired. For this embodiment and those following, a magnetic coil maybe added to the assembly as described below. The magnetic coil may beprotected with a coating such as, for example, SiN, alumina,photoresist, a polymer, and so on.

Magnetic coil 112 may be mounted to substrate 101. Often magnetic coil112 is mounted to substrate 101 prior to the introduction of substrate101 in the mold. Magnetic coil 112 may also be placed in the substrate101 after the molding of SIL 105. Once SIL 105 is formed and magneticcoil 112 is mounted to substrate 101, optical assembly 150 may beinstalled in a slider for use in a disk drive, as described below.

Referring to FIG. 4, a second embodiment of the method of making anoptical assembly 250 includes preforming a SIL 205 before it is placedin a tapered hole 208 in a substrate 201. In this embodiment, SIL 205 isseparately formed by, for example, grinding, machining, lapping, or by aseparate molding operation.

In this embodiment, a coil 212 can be pre-mounted to substrate 201 ormounted after the introduction of substrate 201. Coil 212 can be planarand is usually approximately concentric with tapered hole 208 insubstrate 201. SIL 205 is installed in tapered hole 208 and may protrudethrough the plane of coil 212. Once assembled, optical assembly 250 maybe installed in a slider.

Referring to FIG. 5, a third embodiment includes a partial SIL 305initially mounted to substrate 301. In this embodiment, partial SIL 305is separately formed by, for example, grinding, machining, lapping, orby a separate molding operation. This partial SIL 305 generally coversone side of the tapered hole 308 in substrate 301 and may overhang theedge of substrate 301. Liquid glass, plastic, or other such materialhaving a high index of refraction is then injected into the space formedby tapered hole 308 and partial SIL 305. The index of refraction of theinjected material is often similar to that of partial SIL 305. A coil312 may be mounted on substrate 301 either before or after the materialis injected. The combination of partial SIL 305, the injected material,substrate 301 and coil 312 forms an optical assembly 350.

Referring to FIG. 6(a), a fourth embodiment includes a partial SIL 405on which is mounted a glass plate 429. Glass plate 429 is attached to amesa 421, which may alternatively be formed from a portion of glassplate 429. Mesa 421 may be employed to act as the lower section of theSIL. A complete SIL is thus formed from partial SIL 405, glass plate 429and mesa 421. The complete SIL so formed can be either a hemisphere orsuper-hemisphere. The use of mesa 421 allows for the removal of part ofthe SIL because the refracted light does not extensively use the lowerperiphery of the SIL. More room can thus be gained for the placement ofcoil 412.

For convenience in a particular setup, the coil may be fabricated andinstalled away from the surface of the mesa 421 to reduce the total airbearing surface of the slider. In another implementation, the coil maybe installed such that the plane of the coil is perpendicular to theplane of the disk. In this case, a device such as a permanent magnet oran electromagnet of proper geometry may be used to rotate the fieldaround a 90° angle so that the field can again couple to the disk.

Mesa 421 can be formed in several ways from glass plate 429 which hasapproximately the same index of refraction as partial SIL 405. Forexample, glass plate 429 can have a section removed by grinding, leavingmesa 421. In another method, glass plate 429 can be etched, with thenon-etched portion or the less-etched portion leaving mesa 421. In athird way, glass plate 429 can be appropriately masked, and mesa 421 canbe deposited onto glass plate 429 by various deposition methodsincluding sputtering, evaporation, etc. In a fourth way of fabricatingmesa 421, a mold may be used which simultaneously forms partial SIL 405,mesa 421 and optionally glass plate 429.

Prior to or after the formation of mesa 421, partial sphere 405 may bemounted to glass plate 429 by appropriate bonding techniques.

Referring to FIG. 6(b), a magnetic coil 412 encircles mesa 421. Thismagnetic coil 412 may be formed by, for example, deposition or platingbefore or after mesa 412 is formed. Magnetic coil 412 may be of variousshapes, for example, rectangular, circular, octagonal, etc., and mayhave various numbers of turns.

A fifth embodiment includes a separate coil which is formed on a thinfilm. A thin film magneto-optic coil can be fabricated on a thinmembrane substrate such as SiN. This micro-coil may be plated orsputtered onto a thin membrane which is temporarily supported by a thicksubstrate such as silicon. The thin film has a hole etched or cutthrough its thickness. The center of this hole is approximately in thesame location as the coil center.

The thin film may be removed from the thick substrate and mounted to theflat portion of the SIL lens using various bonding techniques such asvarious adhesives. If a mesa portion is used in this embodiment, themesa may protrude through the hole in the thin film and the magneticcoil.

Referring to FIG. 7, the optical assembly 502 is shown installed in aslider 516 of a magneto-optic recording head 501. A head 501 is shownlocated generally adjacent a disk 528, as in a disk drive. Disk 528 isalso referred to herein as an optical recording medium. In thisposition, head 501 may be reading data from or writing data to disk 528.Slider 516 has an air-bearing surface 522 surrounding a channel surface536. Optical assembly 502 is installed in a cavity or slot adjacentchannel surface 536. The optical assembly is bonded into place bymethods which an include ultraviolet adhesives or epoxies.

Slider 516 provides an optical clear path 520 between SIL 505 and anobjective lens 504 so that electromagnetic radiation such as a laserbeam may be effectively transmitted from one to the other and backagain. The laser beam may emerge from, for example, a source away fromthe slider. optical assembly 502 is installed such that SIL 505 issubstantially or entirely contained within the body of slider 516. Mesa521 is coplanar with or in the vicinity of air bearing surface 522.objective lens 504 is mounted to or near the top surface 534 of slider516. Lens 504 is adjusted by translation in (x,y,z)-directions and alsoin a tilt direction. The “tilt direction” refers to the angle theoptical axis of objective lens 504 makes with the optical axis ofoptical assembly 502. A zero tilt means these axes are parallel. Suchtranslation and tilt may be accomplished by a computer-automatedmounting tool. The objective lens is adjusted until the laser beamdiameter produces the minimum spot size at the recording or readoutlayer surface 554. The amount of adjustment usually depends onconsiderations of the numerical aperture and working distance of theobjective lens, the SIL type (whether hemispherical orsuper-hemispherical), and the index of refraction of the SIL. There isalso occasionally the need to better guide the laser beam into objectivelens 504 on slider 516. To accomplish this, a reflector (not shown) maybe installed above objective lens 504 on the slider to guide the beaminto objective lens 504. This reflector may be, e.g., a mirror or prism.The reflector may alternatively be mounted on an arm coupled to thecoarse actuator.

A coil 512 can circle the base of the SIL. The center opening of coil512 generally allows for the focussed laser beam to pass through. Theshape of coil 512 and its opening may be elongated in one direction toallow a tilted beam to pass in an unhindered manner in the trackingdimension on the optical disk medium. In this way, the coil may be asclose as possible to the mesa without interfering with the beam path.

Because the objective lens 504, optical clear path 520, and opticalassembly 502 can all be mounted to slider 516, they can be stationarywith respect to one another. Therefore, a beam which is focussed can beso maintained so long as the distance between the surface of the mesa521 (or any other component of the head 501) and the disk 528 ismaintained constant. Therefore, there is no need for active focussing,as a proper focus can be maintained automatically in part because of thegeometry of the system.

The optical components described may vary, for example objective lens504 can have a micro-focussing feature and an individual numericalaperture of 0.45 to 1.0. It may be made of, among other materials, glassor plastic. It has a mass typically of less than 35 milligrams.

The partial spherical portion of either the hemispherical orsuper-hemispherical SIL can have a radius of less than or about 2millimeters. For example, SILs having radii of 0.5 mm can be used. TheSIL material's index of refraction can be in the range of 1.4 to 2.5.

The optical recording medium can be a magneto-optical material or aphase-change type material deposited on a media substrate 550. In FIG.7, magneto-optical material layer 554 is shown. The magneto-opticalmaterial may be a rare earth—transition metal compound. Examples ofsuitable such magneto-optical materials are TbFeCo. Media substrate 550can be plastic, glass, or aluminum.

To increase the signal, a reflector layer 552, such as aluminum, and atransparent dielectric layer 553, such as SiN, can be placed between themagneto-optical material and the media substrate.

For protection of the magneto-optical material, on the side of themagneto-optical material opposite the media substrate can be located atransparent dielectric material 556 such as SiN.

In the above embodiments, the optical assembly was formed separatelyfrom the slider. In the below embodiments, at least part of the opticalassembly is formed as part of the slider.

Referring to FIG. 8, a sixth embodiment is shown in which a slider 606has an integral mesa 621 formed on a channel surface 636. Slider 606 ismade from a clear material such as glass or plastic using processes suchas machining, grinding or injection molding, etc. A void 647 is removedfrom a top surface 634 of slider 606. A partial SIL may be installed invoid 647; here the SIL, hemispherical or super-hemispherical, is formedby the combination of partial sphere 605, slider body 606 and mesa 621.An objective lens 604 may be mounted on or near the top surface 634.

FIG. 9 shows a related embodiment where a glass slab 862 is placed on aprojection 864 which extends from channel surface 836 of slider 806.Glass slab 862 has a mesa 821 formed thereon as described above. Amagnetic coil 812, adjacent to mesa 821 may also be part of glass slab862. Coil 812 may be deposited, plated, or bonded adjacent to mesa 821.

Referring to FIG. 10, a seventh embodiment is shown in which a slider901 has an integral partial SIL 905 formed in a void 904 on a topsurface 903 of slider 901. Partial SIL 905 and slider 901 may be formedby, for example, injection molding, machining, or grinding. An integralmesa 907 is formed on a channel surface 908. The complete SIL is formedof partial SIL 905, slider 901 and mesa 907. An objective lens 902 maybe mounted on or near top surface 903. This complete SIL may behemispherical or super-hemispherical.

FIG. 11 shows a related embodiment having a separate step in which aglass slab 955 is placed on a projection 953 which extends from slider951. Glass slab 955 has a mesa 959 formed thereon as described above. Amagnetic coil 957, adjacent to mesa 959 may also be formed on glass slab955. Coil 957 may be deposited, plated, or bonded adjacent to mesa 959.

The present invention has been described in terms of preferredembodiments. The invention, however, is not limited to the embodimentdepicted and described. For example, variations in materials (andtherefore variations in indices of refraction) of the optical componentsmay be used, as well as certain variations in their optical parameterssuch as numerical aperture. Moreover, the invention may be used in anumber of types of optical recording and playback.

Therefore, the scope of invention is defined by the appended claims.

What is claimed is:
 1. A method of integrating an optical assembly intoa slider, comprising the steps of: (a) forming a substantiallytransparent slider having a void in a top surface thereof; (b)installing a partial solid immersion lens into the void; (c) placing anobjective lens on or near the top surface of the slider; and (d) forminga mesa that extends from a bottom surface of the slider; such that theslider, the partial solid immersion lens, the objective lens, and themesa maintain a fixed relationship with respect to each other.
 2. Themethod of claim 1, further comprising the step of depositing or mountinga coil adjacent the mesa.
 3. The method of claim 2, wherein the coilencircles the mesa.
 4. A method of integrating an optical assembly intoa slider, comprising the steps of: (a) forming a substantiallytransparent slider having a partial solid immersion lens formed therein;(b) placing an objective lens on or near a top surface of the slider;and (d) forming a mesa that extends from a bottom surface of the slider;such that the slider, the partial solid immersion lens, the objectivelens, and the mesa maintain fixed distances from each other.
 5. Themethod of claim 4, further comprising the step of depositing or mountinga coil adjacent the mesa.
 6. The method of claim 5, wherein the coilencircles the mesa.
 7. A method of integrating an optical assembly intoa slider, comprising the steps of: (a) forming a substantiallytransparent slider having a void in a top surface thereof; (b)installing a partial solid immersion lens into the void; (c) placing anobjective lens on or near the top surface of the slider; (d) placing aglass plate on a bottom surface of the slider; and (e) forming a mesathat extends from the glass plate; such that the slider, the partialsolid immersion lens, the objective lens, the glass plate, and the mesamaintain a fixed relationship with respect to each other.
 8. The methodof claim 7, further comprising the step of depositing or mounting a coiladjacent the mesa.
 9. The method of claim 8, wherein the coil encirclesthe mesa.
 10. A method of integrating an optical assembly into a slider,comprising the steps of: (a) forming a substantially transparent sliderhaving a partial solid immersion lens formed therein; (b) placing anobjective lens on or near a top surface of the slider; (c) placing aglass plate on a bottom surface of the slider; and (d) forming a mesathat extends from the glass plate; such that the slider, the partialsolid immersion lens, the objective lens, and the mesa maintain fixeddistances from each other.
 11. The method of claim 10, furthercomprising the step of depositing or mounting a coil adjacent the mesa.12. The method of claim 11, wherein the coil encircles the mesa.
 13. Amethod, comprising: (a) forming a substantially transparent sliderhaving a partial solid immersion lens formed as an integral partthereof; and (b) placing an objective lens on or near a top surface ofthe slider at a fixed position relative to the slider; and d) forming atransparent mesa on a bottom surface of the slider in a position suchthat the partial solid immersion lens and the transparent mesa arealigned along an optic axis of the objective lens.
 14. The method as inclaim 13, wherein the transparent mesa is an integral part of the bottomsurface of the slider.
 15. The method as in claim 13, further comprisingattaching a transparent plate to the bottom surface of the slider,wherein the transparent plate has a portion shaped to form thetransparent mesa.